In-Plane SOI MEMS as a Mechanical Material for Time and Frequency Studies on Vibration
- Resource Type
- Conference
- Authors
- Mita, Yoshio; Lebrasseur, Eric; Higo, Akio
- Source
- 2018 12th European Workshop on Microelectronics Education (EWME) Microelectronics Education (EWME), 2018 12th European Workshop on. :101-105 Sep, 2018
- Subject
- Components, Circuits, Devices and Systems
Computing and Processing
General Topics for Engineers
Micromechanical devices
Resonant frequency
Force
Time-domain analysis
Phase measurement
Voltage measurement
Electrostatics
MEMS
vibration
frequency domain
time domain
resonance
- Language
This paper reports use of a one-layer Micro Electro Mechanical Systems (MEMS) resonator made on a Silicon-on-Insulator (SOI) to study electrostatically-induced vibration. The authors experimentally verified that an SOI MEMS linearly responded to each frequency component of induced force. Due to the nature of electrostatic force, control voltage includes an overtone frequency. Each frequency component was mechanically amplified according to the resonance of MEMS, and the observed mechanical movement was a linear combination of them. In a vibration study, students may reproduce precise time-domain movement by frequency characteristics (Bode diagram) and validate them by measured mechanical movement. An insight to frequency- and time-domain relationship is thereby acquirable.