ALD titanium nitride coated carbon nanotube electrodes for electrochemical supercapacitors
- Resource Type
- Conference
- Authors
- Kao, E.; Yang, C.; Warren, R.; Kozinda, A.; Lin, L.
- Source
- 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on. :498-501 Jun, 2015
- Subject
- Bioengineering
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Robotics and Control Systems
Signal Processing and Analysis
Transportation
Electrodes
Tin
Supercapacitors
Surface treatment
Capacitance
Titanium
Surface discharges
Titanium nitride
supercapacitor
atomic layer deposition
electrochemistry
- Language
- ISSN
- 2159-547X
2164-1641
We present titanium nitride (TiN) coated carbon nanotube (CNT) forest electrodes by means of atomic layer deposition (ALD) to store charges in the electrochemical supercapacitors for the first time. The specific achievements as compared with the state-of-art supercapacitor electrodes include: (1) 400 times higher capacitance than a flat-shape electrode; (2) conformal and uniform coating of TiN; and (3) greater than 500% enhancement of electrochemical capacitance at 81mF/cm 2 than CNT electrodes without TiN at 14mF/cm 2 due to increased oxygen vacancies on the TiN surfaces. As such, this work presents a new path to increase energy density of supercapacitors using TiN-based porous materials.