Characteristics of atmospheric pressure glow discharges generated using HF & VHF excitation
- Resource Type
- Conference
- Authors
- Walsh, J. L; Zhang, Y.; Iza, F.; Kong, M. G.
- Source
- 2009 IEEE International Conference on Plasma Science - Abstracts Plasma Science - Abstracts, 2009. ICOPS 2009. IEEE International Conference on. :1-1 Jun, 2009
- Subject
- Power, Energy and Industry Applications
Glow discharges
Character generation
Hafnium
Frequency
Plasma chemistry
Atmospheric-pressure plasmas
Plasma materials processing
Plasma properties
Ionization
Vacuum systems
- Language
- ISSN
- 0730-9244
Summary form only given. Recent studies have shown that atmospheric pressure radio-frequency glow discharges (RF-APGD) have the potential to replace costly vacuum plasma processing systems. 1 Unlike low pressure discharges the highly collisional nature of atmospheric pressure plasma introduces an inherent plasma instability. 2 RF-APGD exhibits a tendency to undergo a glow-to-arc transition (GAT) when the input power exceeds a critical level or when a reactive gas is added to enhance plasma chemistry. One possible means to overcome such instabilities is to increase the excitation frequency beyond the conventional HF band (3–30MHz) and into the VHF band (30–300MHz). 3