Far-Field Acoustic Sensing Via pMUT-Based Subharmonic Tags: A Battery-Free Approach for Hybrid RF-Ultrasound Wireless Sensor Networks
- Resource Type
- Conference
- Authors
- Hussein, Hussein M. E.; Abdalla, Omer Mohamed Osman; Simeoni, Pietro; Colombo, Luca; Corigliano, Alberto; Rinaldi, Matteo; Cassella, Cristian
- Source
- 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :132-135 Jan, 2024
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Wireless sensor networks
Power measurement
Voltage measurement
Ultrasonic variables measurement
Acoustic measurements
Acoustics
Pressure measurement
Piezoelectric-Micromachined-Ultrasonic-Transducer
Wireless-Sensor-Nodes
Subharmonic Tags
Nonlinear Dynamics
Piezoelectric Resonators
- Language
- ISSN
- 2160-1968
We present an innovative class of piezoelectric–micromachined – ultrasonic – transducer (pMUT)-based Ultra-High-Frequency (UHF) subharmonic tags (SubHTs) for far-field sensing. The proposed system leverages the dynamics of a 20×20 36%-doped Scandium Aluminum Nitride (ScAlN) pMUT-array operating at 550 kHz and those of time-modulated circuit components to passively sense ultrasound from long distances with electromagnetic waves. By encoding the low-frequency response of pMUT array into the amplitudes of modulated electrical signals at the output of the SubHT, our research eliminates the need for batteries in acoustic wireless-sensor-nodes (WSNs). This approach significantly enhances the capabilities of WSNs based on acoustic transducers, opening exciting new opportunities for such WSNs in a plethora of applications.