Fabrication of ultralarge single order diffraction grating for soft X-ray monochromator
- Resource Type
- Conference
- Authors
- Hua, Yilei; Gao, Nan; Xie, Changqing
- Source
- 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2016 Symposium on. :1-4 May, 2016
- Subject
- Components, Circuits, Devices and Systems
Gratings
Diffraction gratings
X-ray diffraction
Diffraction
Silicon
Resists
Gold
diffraction grating
nano-fabrication
bonding
- Language
In this work, we present the fabrication process of a large area (100mm×40mm) and thick (30mm) single order diffraction grating for a 10–1000eV soft X-ray monochromator. Three types of diffraction gratings were integrated on one single piece of bulk silicon. The gratings were patterned on a 4 inch silicon wafer using direct e-beam writing with SAL-601. The wafer was etched and diced into a 100mm×40mm×0.5mm slice, and this slice is bonded to a bulk silicon using low temperature Au-Au bonding technology. The performance of this grating is tested in soft X-ray region.