Magnetostrictively induced flexure in a micromachined plate resonator for magnetic field sensing applications
- Resource Type
- Conference
- Authors
- Hatipoglu, Gokhan; Tadigadapa, Srinivas
- Source
- 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on. :807-810 Jun, 2015
- Subject
- Bioengineering
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Robotics and Control Systems
Signal Processing and Analysis
Transportation
Magnetostriction
Amorphous magnetic materials
Magnetic sensors
Magnetometers
Magnetic resonance
Magnetic fields
Magnetic Sensors
Quartz Resonator
Metglas®
Plate Resonator
Bulk Acoustic Wave Resonator
- Language
- ISSN
- 2159-547X
2164-1641
This paper demonstrates a micromachined magnetoelectric (ME) resonator based magnetometer capable of sensing µOe magnetic fields. The device consists of ∼7.5 µm thick (223 MHz) AT-cut quartz bulk acoustic wave, plate-resonator on which 500 nm thick magnetostrictive Metglas ® film is deposited. Application of magnetic fields induces flexural bending in the plate resonator unimorph structure which results in a shift of the resonance frequency. The ultrathin micromachined quartz plate resonator fabricated here showed a sensitivity of ∼800 µ Oe.