Photonic circuits monolithically integrated with silicon photodiodes
- Resource Type
- Conference
- Authors
- Bernard, Martino; Ghulinyan, Mher; Acerbi, Fabio
- Source
- 2022 Italian Conference on Optics and Photonics (ICOP) Optics and Photonics (ICOP), 2022 Italian Conference on. :1-5 Jun, 2022
- Subject
- Aerospace
Communication, Networking and Broadcast Technologies
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Temperature measurement
Couplings
Epitaxial layers
Detectors
Silicon
Epitaxial growth
System-on-chip
Integrated Photonics
Single Photon Detectors
Optoelectronics
EPIC
- Language
We report the realization of an Electronic-Photonic Integrated Circuit. We developed a monolithic process in which a photonic circuit is realized on top of silicon detectors, realized in the epitaxial substrate. Expoliting wedge technology, we developed two coupling methods to send the 850nm optical signal into the detectors. Ultimately, the same technology can be used to realize avalanche photodiodes operating in Geiger mode to acquire single photon resolving capability.