Today, the height of chip packaging is decreasing, and the lead pitch is decreasing. As the market requires higher and higher packaging density, the requirements for high-speed motion and precise positioning of linear motors are getting higher and higher. Linear motors will be affected by interferences such as cogging force, end effect and frictional force in the process of motion. These series of interferences bring challenges to the performance of the motion system. Active disturbance rejection control (ADRC) takes the uncertainty and disturbance of the system, including internal disturbance and external disturbance, and uses the extended state observer to estimate the total disturbance, and eliminates it with the control signal as soon as possible, so as to minimize the disturbance to the effect of the plant. In this paper, the permanent magnet synchronous linear motor of the high-speed and high-precision wire bonding machine is taken as the research object, the open-loop input and output data of the system are obtained through the sine frequency sweep experiment, and converted into frequency response data through fast Fourier transform, and identified by MATLAB object model. The fourth-order S-shaped position planning is used as the input, which can ensure that the acceleration changes continuously while the calculation amount is small, avoiding the shock and vibration of the packaged device caused by the sudden and violent change of the acceleration. A linear ADRC is built, and the state and disturbance of the system are observed and compensated through the expanded state observer, which improves the disturbance immunity of the XY motion platform.