Color Change Characteristics of Plasma Indicators by Vacuum Ultraviolet Irradiation
- Resource Type
- Conference
- Authors
- Shimizu, Akihiro; Endo, Shinichi; Ohshiro, Seisaku
- Source
- 2022 International Conference on Electronics Packaging (ICEP) Electronics Packaging (ICEP), 2022 International Conference on. :97-98 May, 2022
- Subject
- Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Robotics and Control Systems
Signal Processing and Analysis
Transportation
Radiation effects
Color
Reproducibility of results
Plasmas
Electronics packaging
Plasma Indicator
excimer lamp
VUV
oxygenbased radical
color change characteristics
- Language
In this study, we investigated whether "Plasma Indicator TM (hereinafter called "Indicator") for atmospheric plasma and desmear," which detect oxygen-based radicals in plasma, could be used to characterize vacuum ultraviolet (VUV) irradiation from an excimer lamp. We clarified that both Indicators changed color according to the VUV irradiation dose and would be useful for relative evaluation such as confirming the reproducibility of VUV irradiation. We also proposed that an appropriate Indicator suitable for atmospheric plasma or for desmear must be chosen for each application based on the required VUV irradiation dose.