Near-Navigation Grade Tuning Fork MEMS Gyroscope
- Resource Type
- Conference
- Authors
- Endean, Daniel; Christ, Kevin; Duffy, Patrick; Freeman, Eugene; Glenn, Max; Gnerlich, Markus; Johnson, Burgess; Weinmann, Jacob
- Source
- 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Inertial Sensors and Systems (INERTIAL), 2019 IEEE International Symposium on. :1-4 Apr, 2019
- Subject
- General Topics for Engineers
Micromechanical devices
Gyroscopes
Thermal stability
Temperature measurement
Temperature sensors
Vibrations
Bandwidth
MEMS
Gyroscope
IMU
Platform Stabilization
Navigation-grade
- Language
We report performance results on a MEMS out-of-plane gyroscope suitable for platform stabilization. Angle random walk (ARW) less than 0.006 deg/rt-hr and median bias stabilities over temperature of 0.2 deg/hr have been achieved. Sensor bandwidth as characterized by drive and sense mode frequency separation is $> 700$ Hz allowing system level bandwidth greater than 300 Hz. The HG6900 IMU will integrate these sensors and serve platform stabilization applications in a 259 cm3 volume.