500–600 GHz submillimeter-wave 3.3 bit RF MEMS phase shifter integrated in micromachined waveguide
- Resource Type
- Conference
- Authors
- Shah, U.; Decrossas, E.; Jung-Kubiak, C.; Reck, T.; Chattopadhyay, G.; Mehdi, I.; Oberhammer, J.
- Source
- 2015 IEEE MTT-S International Microwave Symposium Microwave Symposium (IMS), 2015 IEEE MTT-S International. :1-4 May, 2015
- Subject
- Fields, Waves and Electromagnetics
Micromechanical devices
Semiconductor device measurement
Rectangular waveguides
Electric variables measurement
Hip
Microscopy
Switches
Micromachined waveguide
phase shifter
RF MEMS
rectangular waveguide
submillimeter-wave
terahertz
- Language
- ISSN
- 0149-645X
This paper presents a 500–600 GHz submillimeterwave MEMS-reconfigurable phase shifter. It is the first ever RF MEMS component reported to be operating above 220 GHz. The phase shifter is based on a micromachined rectangular waveguide which is loaded by 9 E-plane stubs, which can be individually blocked by using MEMS-reconfigurable surfaces. The phase-shifter is composed of three metallized silicon chips which are assembled in H-plane cuts of the waveguide. The measurement results of the first prototypes of the MEMS reconfigurable phase shifter show a linear phase shift of 20° in 10 steps (3.3 bit) and have a return loss better than 15 dB from 500–600 GHz. The insertion loss is better than 3 dB up to 540 GHz, and better than 5 dB up to 600 GHz for all phase states, of which the major part is contributed by the assembly of the microchips between waveguide flanges which has a reproducibility error between 2 and 6 dB measured for reference chips.