Multilayer microcantilever heater-thermometer with improved thermal resistance for nanotopography measurements
- Resource Type
- Conference
- Authors
- Dai, Zhenting; Corbin, Elise A.; King, William P.
- Source
- 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on. :460-463 Jan, 2010
- Subject
- Components, Circuits, Devices and Systems
Power, Energy and Industry Applications
Bioengineering
Communication, Networking and Broadcast Technologies
Thermal resistance
Nonhomogeneous media
Resistance heating
Nanotopography
Electrical resistance measurement
Silicon
Surfaces
Fabrication
Testing
Leg
- Language
- ISSN
- 1084-6999
This paper reports the design, fabrication, and testing of a multilayer cantilever structure having a doped silicon heater-thermometer separated from the silicon cantilever legs by a thermally insulating silicon nitride layer. The multilayer microcantilever can be heated above 600 °C. Highly sensitive thermal topography measurements were successfully demonstrated on a 20 nm tall silicon grating. The thermal topography results agree well with the conventional laser deflection measurements. We achieved a thermal topography reading sensitivity of 1.3×10{−4} nm −1 and a thermal topography resolution of 6.9 pm/√Hz. This compares well to published data on other types of cantilevers.