Slot waveguide electro-optic modulator with ferroelectric oxide BaTiO3 on silicon
- Resource Type
- Conference
- Authors
- Hu, X.; Orobtchouk, R.; Cueff, S.; Rojo Romeo, P.R.; Regreny, P.; Bachelet, R.; Mazet, L.; Louahadj, L.; Moalla, R.; Dubourdieu, C.; Vilquin, B.; Girons, G.S.; Castera, P.; Sanchez, N.; Angelova, T.; Griol, A.; Gutierrez, A.M.; Sanchis, P.
- Source
- 11th International Conference on Group IV Photonics (GFP) Group IV Photonics (GFP), 2014 IEEE 11th International Conference on. :241-242 Aug, 2014
- Subject
- Photonics and Electrooptics
Electrooptical waveguides
Electrooptic modulators
Silicon
Optical device fabrication
Optical films
Optical refraction
silicon integrated photonics
electro-optic effect
slot waveguide
ferroelectric oxide BaTiO3
- Language
- ISSN
- 1949-2081
1949-209X
We present design and fabrication of a slot waveguide BaTiO 3 /Si Mach-Zehnder modulator. Modelling results based on anisotropic finite-difference mode solver show variation of effective index of 1.57×10 −3 and a Vπ·L of 0.98 V·cm.