Finite element analysis of MEMS square piezoresistive accelerometer designs with low crosstalk
- Resource Type
- Conference
- Authors
- Bhalla, Nikhil; Li, Sheng-Shian; Chung, Danny Wen-Yaw
- Source
- CAS 2011 Proceedings (2011 International Semiconductor Conference) Semiconductor Conference (CAS), 2011 International. 2:353-356 Oct, 2011
- Subject
- Components, Circuits, Devices and Systems
Communication, Networking and Broadcast Technologies
Computing and Processing
Piezoresistive devices
Accelerometers
Piezoresistance
Stress
Sensitivity
Acceleration
Sensors
- Language
- ISSN
- 1545-827X
2377-0678
The investigation in this paper involves Final Element Analysis (FEA) of piezoresistive accelerometer designs. Three different configurations of MEMS based accelerometer has been made and analysed using COMSOL Multiphysics. The designs presented in this paper consist of a square shaped proof mass with flexures supporting it. Different position and varied number of supporting flexures attached to the proof mass makes each configuration distinct. The piezoresistors are placed near the proof mass and frame ends on the flexure. In all three configurations the piezoresistors are placed and connected so as to minimize crosstalk.