Large scale programmable photonic circuits using silicon photonic MEMS
- Resource Type
- Conference
- Authors
- Khan, Umar; Zand, Iman; Edinger, Pierre; Jo, Gaehun; Bleiker, Simon J.; Takabayashi, Alain Yuji; Antony, Cleitus; Lee, Junsu; Malik, Arun Kumar; Verheyen, Peter; Arce, Cristina Lerma; Jonuzi, Tigers; Watte, Jan; Quack, Niels; Niklaus, Frank; Gylfason, Kristinn B.; Bogaerts, Wim
- Source
- 2022 Conference on Lasers and Electro-Optics (CLEO) Lasers and Electro-Optics (CLEO), 2022 Conference on. :1-2 May, 2022
- Subject
- Photonics and Electrooptics
Micromechanical devices
Actuators
Photonic integrated circuits
Couplers
Silicon photonics
Electrooptical waveguides
- Language
We demonstrate low-power and non-volatile MEMS actuators on an industrially established silicon photonics platform. The compact electrostatically actuated phase shifters and tunable couplers enable large-scale programmable photonic integrated circuits.