Sub-mA Threshold Current Vertical Cavity Surface Emitting Lasers with a Simple Fabrication Process
- Resource Type
- Conference
- Authors
- Baker, Jack; Gillgrass, Sara; Allford, Craig P.; Hentschel, Curtis; Davies, J. Iwan; Shutts, Samuel; Smowton, Peter M.
- Source
- 2021 IEEE Photonics Conference (IPC) Photonics Conference (IPC),2021 IEEE. :1-2 Oct, 2021
- Subject
- Components, Circuits, Devices and Systems
Fabrication
Planarization
Conferences
Apertures
Threshold current
Vertical cavity surface emitting lasers
Photonics
VCSEL
manufacturing
fabrication
- Language
- ISSN
- 2575-274X
sub-mA threshold currents are achieved for VCSELs using a simplified fabrication process which employs etched oxidation-vias for definition of the VCSEL aperture, as well as ease in formation of a bond pad without the need for bisbenzocyclobutane planarisation.