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요약정보
靶材用钨硅合金的制备工艺 / Preparation technology of tungsten silicide alloys used for sputtering target
Resource Type
Academic Journal
Authors
黄志民
;
王德志
;
吴壮志
;
陈金
;
李保强
;
HUANG Zhi-min
;
WANG De-zhi
;
WU Zhuang-zhi
;
CHEN Jin
;
LI Bao-qiang
Source
粉末冶金技术 / Powder Metallurgy Technology
. 39(5):445-451
Subject
靶材;钨硅合金;制备工艺;热力学分析
Language
Chinese
ISSN
1001-3784
Online Access
Scopus
Find it @ DONGA
초록
以钨硅混合粉体为原料,通过真空煅烧制备钨硅合金块体,再经破碎、烧结致密化后成功制备出符合半导体使用要求的钨硅靶材.研究了煅烧温度和保温时间对合金块体的物相成分、显微结构、氧含量和碳含量(质量分数)的影响.结果表明,通过高温煅烧合金化可以显著降低材料的氧含量和碳含量,煅烧温度对氧元素的脱除具有重要的影响.最佳制备工艺为1250℃煅烧5 h,在该条件下钨硅合金中氧的质量分数可由0.3000%降至0.0121%,材料中的单质钨完全转化为钨硅合金相.
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