基于投影光刻技术的微透镜阵列加工方法 / Microlens array machining method based on projection lithography
- Resource Type
- Academic Journal
- Source
- 光电工程 / Opto-Electronic Engineering. 50(12):87-97
- Subject
微透镜阵列 投影光刻技术 掩模移动滤波技术 microlens array projection lithography mask moving filtering technology - Language
- Chinese
- ISSN
- 1003-501X