基于改进六步翻转法的平行平板面形及均匀性绝对检测方法 / Absolute testing of planarity and inhomogeneity with modified six-step method
- Resource Type
- Academic Journal
- Source
- 光电工程 / Opto-Electronic Engineering. 48(7):23-31
- Subject
光学检测 干涉计量 绝对检测 不确定度评估 - Language
- Chinese
- ISSN
- 1003-501X