磁控溅射参数和锂添加对LiPON薄膜离子电导率的影响 / Effect of magnetron sputtering process parameters and Li addition on the ionic conductivity of LiPON films
- Resource Type
- Academic Journal
- Source
- 武汉科技大学学报 / Journal of Wuhan University of Science and Technology(Natural Science Edition). 46(6):424-429
- Subject
射频磁控溅射 固态电解质 LiPON薄膜 锂添加 离子电导率 RF magnetron sputtering solid electrolyte LiPON thin film Li addition ionic conductiv-ity - Language
- Chinese
- ISSN
- 1674-3644