减少静电漂移的高可靠RF MEMS开关研究 / Research on anti-static and long-life high stability RF MEMS switch
- Resource Type
- Academic Journal
- Source
- 电子测量与仪器学报 / Journal of Electronic Measurement and Instrumentation. 37(11):41-55
- Subject
RF MEMS开关 可靠性 介质充电 开关寿命 电荷注入 接触碰撞 RF MEMS switches reliability dielectric charging switching life charge injection contact collision - Language
- Chinese
- ISSN
- 1000-7105