Beam power scale-up in MEMS based multi-beam ion accelerators
- Resource Type
- Working Paper
- Authors
- Ji, Q.; Afridi, K. K.; Bauer, T.; Giesbrecht, G.; Hou, Y.; Lal, A.; Ni, D.; Persaud, A.; Qin, Z.; Seidl, P.; Sinha, S.; Schenkel, T.
- Source
- Review of Scientific Instruments 92, 103301 (2021)
- Subject
- Physics - Accelerator Physics
- Language
We report on the development of multi-beam RF linear ion accelerators that are formed from stacks of low cost wafers and describe the status of beam power scale-up using an array of 120 beams. The total argon ion current extracted from the 120-beamlet extraction column was 0.5 mA. The measured energy gain in each RF gap reached as high as 7.25 keV. We present a path of using this technology to achieve ion currents >1 mA and ion energies >100 keV for applications in materials processing.