Sub-$\mu$ structured Lotus Surfaces Manufacturing
- Resource Type
- Working Paper
- Authors
- Worgull, M.; Heckele, M.; Mappes, T.; Matthis, B.; Tosello, G.; Metz, T.; Gavillet, J.; Koltay, P.; Hansen, H. N.
- Source
- Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)
- Subject
- Computer Science - Other Computer Science
- Language
Sub-micro structured surfaces allow modifying the behavior of polymer films or components. Especially in micro fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patterning with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g. with gradients). In this paper we present the process chain to realize polymer sub-micro structures with minimum lateral feature size of 400 nm and up to 4 micrometers high.
Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)