High-Quality Hybrid Double-layer-Silicon on Silicon Nitride Platform for Integrated Photonic Applications
- Resource Type
- Authors
- Tianren Fan; Ali A. Eftekhar; Xi Wu; Amir H. Hosseinnia; Hesam Moradinejad; Ali Adibi
- Source
- Scopus-Elsevier
- Subject
- Double layer (biology)
Coupling
Materials science
Silicon
business.industry
chemistry.chemical_element
02 engineering and technology
Chemical vapor deposition
Radius
021001 nanoscience & nanotechnology
01 natural sciences
010309 optics
chemistry.chemical_compound
Resonator
Silicon nitride
chemistry
0103 physical sciences
Optoelectronics
Photonics
0210 nano-technology
business
- Language
We demonstrate a hybrid double-layer-crystalline-silicon on silicon nitride platform formed by a two-step of bonding process. We report high Q of 400, 000 for a 40 μm radius microresonator in the platform using evanescent coupling between different layers.