Fabrication of multilayer GaAlAs/GaAs microtips for VCSEL-based optical near-field sensors
- Resource Type
- Authors
- Sabry Khalfallah; Christophe Gorecki
- Source
- Microsystems Engineering: Metrology and Inspection.
- Subject
- Nanolithography
Fabrication
Materials science
Optics
business.industry
Etching (microfabrication)
Optical engineering
Near-field optics
Near-field scanning optical microscope
business
Vertical-cavity surface-emitting laser
Radius of curvature (optics)
- Language
- ISSN
- 0277-786X
We propose to fabricate GaAlAs/GaAs multi-layer microtips for scanning near-field optical microscopy (SNOM) using the anisotropic etching. The etching was performed in a solution of H3PO4:H2O2:H2O, operating at the temperature of 10 degrees C. We obtained the pyramid-shaped microtips with four etched facets and with a radius of curvature at the apex lower than 50 nm.© (2001) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.