DC‐contact radio‐frequency microelectromechanical system symmetric toggle switch on a borofloat substrate
- Resource Type
- Authors
- Zewen Liu; Chenxu Zhao; Ling Li; Zhihao Hou
- Source
- Micro & Nano Letters. 8:221-224
- Subject
- Radio frequency microelectromechanical system
Materials science
business.industry
Contact resistance
Biomedical Engineering
Bioengineering
Condensed Matter Physics
Stiction
Optoelectronics
Insertion loss
General Materials Science
Restoring force
Radio frequency
Crossover switch
business
Voltage
- Language
- ISSN
- 1750-0443
Presented is a DC-contact radio-frequency (RF) microelectromechanical system symmetric toggle switch for broadband power applications. Based on the lever principle, the proposed switching structure can be toggled upwards with extra restoring force using push electrodes. This push mechanism greatly improves the isolation and efficiently avoids the down-state stiction of the contacts which leads to enhancement of the power-handling capability. The measured actuated voltage is 33.4 V and the contact resistance of the switch can be further decreased to 0.18 Ω under a pull in voltage of 60 V, which results in the improvement of insertion loss. The switch can be properly restored with a voltage of 30 V applied to the push electrode. In addition, the substrate loss is reduced by using a Boroloat™ glass substrate. The RF measurement results show that the switch can handle a minimum 1 W incident RF signal power with isolation and an insertion loss of better than -30 and -0.24 dB from DC to the X-band.