Thermal conductivity measurements of thin-film silicon dioxide
- Resource Type
- Authors
- H.A. Schafft; J.S. Suehle; P.G.A. Mirel
- Source
- Proceedings of the 1989 International Conference on Microelectronic Test Structures.
- Subject
- Semiconductor thin films
Stress (mechanics)
chemistry.chemical_compound
Thermal conductivity
Materials science
chemistry
Silicon dioxide
Semiconductor technology
Electronic engineering
Composite material
Thin film
Joule heating
- Language
Measurements of the thermal conductivity of micrometer-thick films of silicon dioxide are reported for the first time. Results show that the thermal conductivity is much lower than the values reported for bulk specimens, decreases with increasing temperature, and decreases with decreasing film thickness. This means that heating effects may be much larger than expected in accelerated stress tests and in other cases where joule heating can be a concern. >