The oxide film formed on a corrosion-resistant multi-principal element alloy 38Ni-21Cr-20Fe-13Ru-6Mo-2W (at. %) was characterized via transmission electron microscopy and atom probe tomography. Oxidation in air at 600°C for 1080 minutes resulted in a complex, layered film with multiphase inner and outer oxide scales, and localized recrystallization in the underlying base alloy. The outer oxide scale is dominated by two phases: a Ni-Fe spinel (≈NiFe2O4) and a Ni-rich monoclinic phase (NiMoO4). The inner oxide consists of a near surface Ni-Fe-Cr spinel and RuO2, and semi-continuous Cr2O3 with oxygen-rich Ru-Mo metal inclusions. Local recrystallization and concomitant elemental partitioning in the base alloy was influenced by a high dislocation density in the as-prepared sample surface.