MATLAB fuzzy logic controller (FLC) is used for the parametric estimation of the MEMS-based thermopneumatic micropump. The effect of voltage and frequency applied on the micropump were studied on the back pressure and flow rate. The increase in voltages and frequency were decreased the back pressure and fluid flow rate. Similarly, with a decrease in voltages and frequency were increased the back pressure and fluid flow rate. The difference between the MAMDANI calculated value and the simulated value from the rule viewer is 1.61% for both the output of back pressure and flow rate
{"references":["[1]\tO. C. Jeong and S. S. Yang, \"Fabrication of a thermopneumatic micropump with aluminum flap valves,\" J. Korean Phys. Soc., vol. 37, no. 6, pp. 873–877, 2000, doi: 10.3938/jkps.37.873. [2]\tH. K. Bardaweel and S. K. Bardaweel, \"Dynamic simulation of thermopneumatic micropumps for biomedical applications,\" Microsyst. Technol., vol. 19, no. 12, pp. 2017–2024, 2013, doi: 10.1007/s00542-012-1734-3. [3]\tY. J. Yang and H. H. Liao, \"Development and characterization of thermopneumatic peristaltic micropumps,\" J. Micromechanics Microengineering, vol. 19, no. 2, 2009, doi: 10.1088/0960-1317/19/2/025003. [4]\tC. Joshitha, B. S. Sreeja, and S. Radha, \"A review on micropumps for drug delivery system,\" Proc. 2017 Int. Conf. Wirel. Commun. Signal Process. Networking, WiSPNET 2017, vol. 2018-Janua, pp. 186–190, 2018, doi: 10.1109/WiSPNET.2017.8299745. [5]\tP. K. Das and A. B. M. T. Hasan, \"Mechanical micropumps and their applications: A review,\" AIP Conf. Proc., vol. 1851, 2017, doi: 10.1063/1.4984739. [6]\tS. Mohith, P. N. Karanth, and S. M. Kulkarni, \"Experimental investigation on performance of disposable micropump with retrofit piezo stack actuator for biomedical application,\" Microsyst. Technol., vol. 25, no. 12, pp. 4741–4752, 2019, doi: 10.1007/s00542-019-04414-2. [7]\tM. W. Ashraf, S. Tayyaba, and N. Afzulpurkar, \"Micro Electromechanical Systems (MEMS) based microfluidic devices for biomedical applications,\" Int. J. Mol. Sci., vol. 12, no. 6, pp. 3648–3704, 2011, doi: 10.3390/ijms12063648. [8]\tS. Mohith, P. N. Karanth, and S. M. Kulkarni, \"Recent trends in mechanical micropumps and their applications: A review,\" Mechatronics, vol. 60, no. February, pp. 34–55, 2019, doi: 10.1016/j.mechatronics.2019.04.009. [9]\tR. Barua, S. Datta, A. R. Chowdhury, and P. Datta, \"Advances in MEMS and Micro-Scale Technologies for Application in Controlled Drug-Dosing Systems,\" no. May, pp. 165–179, 2018, doi: 10.4018/978-1-5225-4969-7.ch007. [10]\tC. Huo, C. Bai, and P. Zhang, \"Micropumps for Microfluidic Devices and BioMEMS,\" J. Phys. Conf. Ser., vol. 1626, no. 1, 2020, doi: 10.1088/1742-6596/1626/1/012040. [11]\tP. Woias, \"Micropumps—past, progress and future prospects,\" Sensors Actuators B Chem., vol. 105, no. 1, pp. 28–38, 2005, doi: 10.1016/j.snb.2004.02.033. [12]\tB. D. Iverson and S. V. Garimella, \"Recent advances in microscale pumping technologies: A review and evaluation,\" Microfluid. Nanofluidics, vol. 5, no. 2, pp. 145–174, 2008, doi: 10.1007/s10404-008-0266-8. [13]\tP. P, \"Design , Fabrication and Finite Element Analysis of Thermo- Pneumatic Micro Pump for Biomedical Applications,\" Int. Res. J. Eng. Technol., vol. 10, no. 4, pp. 2008–2013, 2017. [14]\tY. N. Wang and L. M. Fu, \"Micropumps and biomedical applications – A review,\" Microelectron. Eng., vol. 195, pp. 121–138, 2018, doi: 10.1016/j.mee.2018.04.008. [15]\tP. S. Chee, M. Nafea, P. L. Leow, and M. S. M. Ali, \"Thermal analysis of wirelessly powered thermo-pneumatic micropump based on planar LC circuit,\" J. Mech. Sci. Technol., vol. 30, no. 6, pp. 2659–2665, 2016, doi: 10.1007/s12206-016-0527-5. [16]\tP. S. Chee, M. N. Minjal, P. L. Leow, and M. S. M. Ali, \"Wireless powered thermo-pneumatic micropump using frequency-controlled heater,\" Sensors Actuators, A Phys., vol. 233, pp. 1–8, 2015, doi: 10.1016/j.sna.2015.06.017. [17]\tMuhudin, Ghulam. Shah, Asad Ali, Khan, Maria. Akhlaq, Maham. Qasim, Faheem \"PARAMETRIC ESTIMATION OF SURGICAL ROBOTIC ARM USING,\" vol. 1, no. 1, 2021. [18]\tM. Akhlaq and F. Qasim, \"Analysis of the Effect of N719 Dye Concentration and Anode Soaking Time on the Performance of DSSC Using Fuzzy Analysis,\" vol. 1, no. 1, pp. 39–51, 2020. [19]\tJavaid, Farah. M.El-Sheikh, \"FUZZY SIMULATION OF DRUG DELIVERY SYSTEM THROUGH VALVE-LESS MICROPUMP,\" vol. 1, no. 1, pp. 1–9, 2021."]}