Developing of NbN films for superconducting microstrip single-photon detector
- Resource Type
- Authors
- N. N. Manova; Yu. P. Korneeva; Alexander Korneev; N. O. Simonov
- Source
- Journal of Physics: Conference Series. 1695:012116
- Subject
- Superconductivity
History
Materials science
business.industry
Photon detector
Optoelectronics
business
Microstrip
Computer Science Applications
Education
- Language
- ISSN
- 1742-6596
1742-6588
We optimized NbN films on a Si substrate with a buffer SiO2 layer to produce superconducting microstrip single-photon detectors with saturated dependence of quantum efficiency (QE) versus normalized bias current. We varied thickness of films and observed the maximum QE saturation for device based on the thinner film with the lowest ratio R S 300/R S 20.