Near-field optical metrology
- Resource Type
- Authors
- Michel Spajer
- Source
- SPIE Proceedings.
- Subject
- Physics
business.industry
Resolution (electron density)
Near-field optics
Astrophysics::Instrumentation and Methods for Astrophysics
Physics::Optics
Near and far field
Image processing
Sample (graphics)
Metrology
Interferometry
Optics
Dimensional metrology
business
- Language
- ISSN
- 0277-786X
The relations of Near Field Optics with Metrology are of two kinds. First, it shifts the resolution limit towards the nanometer scale. This improvement is due to a strong interaction between the probe and the sample and its consequence for the quantitative interpretation is a non- linear relation between the image and the object. Secondly, Near Field Optics uses some of the classical detection methods of metrology such as heterodyne interferometry and image processing.