Passivated Selective Contact Structure Characterization by C-AFM and KPFM of the Conduction by Pinholes
Resource Type
Authors
Marchat, Clément ; Morisset, Audrey ; Alvarez, José ; Cabal, Raphaël ; Gueunier, Marie-Estelle ; Kleider, Jean-Paul
Source
28th International Conference on Amorphous and nanocrystalline Semiconductors (ICANS 28) 28th International Conference on Amorphous and nanocrystalline Semiconductors (ICANS 28), Aug 2019, Palaiseau, France
Subject
[SPI.OPTI] Engineering Sciences [physics]/Optics / Photonic [SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics [SPI.NRJ]Engineering Sciences [physics]/Electric power [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic [SPI.MAT] Engineering Sciences [physics]/Materials [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics [PHYS.COND.CM-MS] Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] ComputingMilieux_MISCELLANEOUS [SPI.NRJ] Engineering Sciences [physics]/Electric power [SPI.MAT]Engineering Sciences [physics]/Materials
Language
English