P-140L:Late-News Poster: Crystallization of Amorphous Silicon Films on Flexible Glass by Blue-Multi-Diode-Laser Annealing as a New LTPS
- Resource Type
- Authors
- Jean de Dieu Mugiraneza; Katsuya Shirai; Tatsuya Okada; Takashi Noguchi; Takuma Nishinohara; Taketsugu Itoh
- Source
- SID Symposium Digest of Technical Papers. 43:1129-1132
- Subject
- Amorphous silicon
Materials science
Amorphous solid
law.invention
Annealing (glass)
Laser annealing
chemistry.chemical_compound
Crystallinity
chemistry
law
Thin film
Composite material
Crystallization
Diode
- Language
- ISSN
- 0097-966X
In this paper, we have successfully crystallized the amorphous silicon thin films on flexible thin glass of 100 μm by adopting blue-multi-diode-laser annealing. The crystallized films on flexible thin glass showed high crystallinity and good electrical properties as well as on the conventional thick glass with the thickness of 0.7 mm.