Density scaling with gate-all-around silicon nanowire MOSFETs for the 10 nm node and beyond
- Resource Type
- Source
- 2013 IEEE International Electron Devices Meeting.
- Subject
Materials science Silicon business.industry Nanowire chemistry.chemical_element Nanotechnology Density scaling CMOS chemistry MOSFET Optoelectronics Node (circuits) Field-effect transistor Silicon nanowires business - Language