Metrology of thin resist for high NA EUVL
- Resource Type
- Article
- Authors
- Robinson, John C.; Sendelbach, Matthew J.; Lorusso, Gian Francesco; Beral, Christophe; Bogdanowicz, Janusz; De Simone, Danilo; Hasan, Mahmudul; Jehoul, Christiane; Moussa, Alain; Saib, Mohamed; Zidan, Mohamed; Severi, Joren; Truffert, Vincent; Van den Heuvel, Dieter; Goldenshtein, Alex; Houchens, Kevin; Santoro, Gaetano; Fischer, Daniel; Muellender, Angelika; Hung, Joey; Koret, Roy; Turovets, Igor; Ausschnitt, Kit; Mack, Chris; Kondo, Tsuyoshi; Shohjoh, Tomoyasu; Ikota, Masami; Charley, Anne-Laure; Leray, Philippe
- Source
- Proceedings of SPIE; May 2022, Vol. 12053 Issue: 1 p120530O-120530O-12, 11932483p
- Subject
- Language
- ISSN
- 0277786X