We developed the coupled calculation of plasma and gas flows in simulations for dual-frequency excited Ar/SF6plasma. By focusing on the effect of secondary electron emission (SEE), we varied SEE coefficient ?and determined ?= 0.04 from the comparison of calculation results with the experimental results. The dependence of electron density on spatial distribution and SF6gas partial pressure was compared between calculation and experimental results. As a result, at SF6= 5.0 sccm, the calculated electron densities at the center and edge were almost the same as the experimental results. Furthermore, at SF6= 2.5 sccm, the error from the experiment including the spatial distribution was in the range of -11.03 to 4.11%, and the results of coupled calculation of plasma and gas flows in simulations can reproduce the experimental results under at a SF6partial pressure in the range from 2.5 to 5.0 sccm.