Impact of increasing EUV absorption of CAR polymers on lithographic performance
- Resource Type
- Article
- Authors
- Guerrero, Douglas; Amblard, Gilles R.; Cen, Yinjie; Aqad, Emad; Cui, Li; Coley, Suzanne M.; Park, Jong Keun; Naab-Rafael, Benjamin D.; Rena, Rochelle; Paul, Tyler; Eckert, Sylvie; Wu, Chunyi; Finch, Mike; Behnke, Jason; Lee, ChoongBong; Petrillo, Karen
- Source
- Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129571Z-129571Z-8, 1166148p
- Subject
- Language
- ISSN
- 0277786X