Development of amorphous silicon based EUV hardmasks through physical vapor deposition
- Resource Type
- Article
- Authors
- Gargini, Paolo A.; Naulleau, Patrick P.; Ronse, Kurt G.; Itani, Toshiro; De Silva, Anuja; Mignot, Yann; Meli, Luciana; DeVries, Scott; Xu, Yongan; Seshadri, Indira; Felix, Nelson M.; Zeng, Wilson; Cao, Yong; Phan, Khoi; Dai, Huixiong; Ngai, Christopher S.; Stolfi, Michael; Diehl, Daniel L.
- Source
- Proceedings of SPIE; October 2017, Vol. 10450 Issue: 1 p104501A-104501A-14, 10345614p
- Subject
- Language
- ISSN
- 0277786X