Sealing Method of Dry-Etched AlAs?/?GaAs Top Mirrors in Vertical Cavity Surface Emitting Lasers
- Resource Type
- Article
- Authors
- Bruyn, de; der, van; Roer, van de; and, Smalbrugge; Roy, van
- Source
- Electrochemical and Solid State Letters; February 1999, Vol. 2 Issue: 2 p83-85, 3p
- Subject
- Language
- ISSN
- 10990062; 19448775
A versatile sealing process for layers is presented. This sealing prevents the layers of top distributed Bragg reflectors from further undesired oxidation during the wet oxidation of the current constriction layers in vertical cavity surface emitting lasers. This method has been successfully applied to protect the etched pillars in top mirrors although those pillars were plasma dry etched. (c)1999 The Electrochemical Society