Three-dimensional imaging of integrated circuits with macro- to nanoscale zoom.
- Resource Type
- Article
- Authors
- Holler, Mirko; Odstrcil, Michal; Guizar-Sicairos, Manuel; Lebugle, Maxime; Müller, Elisabeth; Finizio, Simone; Tinti, Gemma; David, Christian; Zusman, Joshua; Unglaub, Walter; Bunk, Oliver; Raabe, Jörg; Levi, A. F. J.; Aeppli, Gabriel
- Source
- Nature Electronics; Oct2019, Vol. 2 Issue 10, p464-470, 7p
- Subject
- Language
- ISSN
- 25201131