Macro CDSEM 2D Metrology Supporting Advanced DRAM Patterning.
- Resource Type
- Article
- Authors
- Kris, R.; Klebanov, G.; Schwarzband, I.; Sommer, E.; Gershtein, L.; Mathew, B.; Noifeld, E.; Levy, S.; Alkoken, R.; Novak, O.; Miroku, H.; Rathore, D.; Pastur, S.; Duvdevani-Bar, S.; Bar-On, T.; Horikawa, I.
- Source
- Proceedings of SPIE; 1/22/2019, Vol. 10959, p1-8, 8p
- Subject
- Language
- ISSN
- 0277786X