Removing GaAs substrate by nitric acid solution.
- Resource Type
- Article
- Authors
- Li, C. C.; Guan, B. L.; Chuai, D. X.; Guo, X.; Shen, G. D.
- Source
- Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; May2010, Vol. 28 Issue 3, p635-637, 3p, 1 Black and White Photograph, 1 Chart, 2 Graphs
- Subject
- GALLIUM arsenide
NITRIC acid
SUBSTRATES (Materials science)
SURFACE chemistry
LIGHT emitting diodes
- Language
- ISSN
- 21662746
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