Formation of Mosaic Silicon Oxide Structure during Metal-Assisted Electrochemical Etching of Silicon at High Current Density.
- Resource Type
- Article
- Authors
- Cao, Dao; Anh, Cao; Ngan, Luong
- Source
- Journal of Electronic Materials; May2016, Vol. 45 Issue 5, p2615-2620, 6p, 2 Black and White Photographs, 1 Chart
- Subject
- SILICON oxide
ELECTROCHEMICAL analysis
ETCHING
ETCHING reagents
CURRENT density (Electromagnetism)
ELECTROLYTES
POROUS silicon
- Language
- ISSN
- 03615235
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