A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application.
- Resource Type
- Academic Journal
- Authors
- Xu J; The School of Engineering, Institute for Integrated Micro and Nano Systems, University of Edinburgh, Edinburgh EH9 3FF, UK.; AAC Technologies (Scotland) Limited, Edinburgh EH3 8EG, UK.; Wood GS; The School of Engineering, Institute for Integrated Micro and Nano Systems, University of Edinburgh, Edinburgh EH9 3FF, UK.; Mastropaolo E; The School of Engineering, Institute for Integrated Micro and Nano Systems, University of Edinburgh, Edinburgh EH9 3FF, UK.; Lomax P; The School of Engineering, Institute for Integrated Micro and Nano Systems, University of Edinburgh, Edinburgh EH9 3FF, UK.; Newton M; The Acoustics and Audio Group, University of Edinburgh, Edinburgh EH8 9DF, UK.; Cheung R; The School of Engineering, Institute for Integrated Micro and Nano Systems, University of Edinburgh, Edinburgh EH9 3FF, UK.
- Source
- Publisher: MDPI Country of Publication: Switzerland NLM ID: 101640903 Publication Model: Electronic Cited Medium: Print ISSN: 2072-666X (Print) Linking ISSN: 2072666X NLM ISO Abbreviation: Micromachines (Basel) Subsets: PubMed not MEDLINE
- Subject
- Language
- English
- ISSN
- 2072-666X
A graphene/poly(methyl methacrylate) (PMMA) closed cavity resonator with a resonant frequency at around 160 kHz has been fabricated. A six-layer graphene structure with a 450 nm PMMA laminated layer has been dry-transferred onto the closed cavity with an air gap of 105 μm. The resonator has been actuated in an atmosphere and at room temperature by mechanical, electrostatic and electro-thermal methods. The (1,1) mode has been observed to dominate the resonance, which suggests that the graphene/PMMA membrane has been perfectly clamped and seals the closed cavity. The degree of linearity of the membrane's displacement versus the actuation signal has been determined. The resonant frequency has been observed to be tuned to around 4% by applying an AC voltage through the membrane. The strain has been estimated to be around 0.08%. This research puts forward a graphene-based sensor design for acoustic sensing.