FESEM image of standing hollow circular cylinder ordered arrays. [Display omitted] • Standing hollow circular cylinder ordered arrays (HCCA) on silicon substrate has been fabricated by RIE method. • The fabrication mechanism of HCCA was proposed. • The formed Au@HCCA exhibit excellent SERS property using Handheld Raman Spectrometer excited. Herein, we reported a facile and efficient method to mass fabricate special structure of standing hollow circular cylinder ordered arrays (HCCA). The strategy of fabrication of the HCCA is reactive ion etching of silicon covered with monolayer colloidal spheres as mask under the mixture of SF 6 and O 2 plasma. Based on study of the whole formation process and different factor (such as sample stage, the flow of SF 6 and O 2 , power), we put forward the formation mechanism of HCCA. Research shows that Al sample stage play a crucial effect in formation of such structure. And the presence of O 2 and the flow of SF 6 are also important factor. Based on HCCA as platform, we can obtain Au@ HCCA structure through sputtering deposition method. The formed Au@HCCA can be used as SERS substrate, and exhibit excellent SERS property using Handheld Raman Spectrometer excited with wavelength of 785 nm. The finite difference time domain (FDTD) simulation results have revealed that SERS "hot spots" are almost distributed at edge site of Au@HCCA. Obviously, such HCCA structure as platform, it can also be applied to a more wide range of fields. [ABSTRACT FROM AUTHOR]