This paper presents a linearity improved 10-bit 120-MS/s successive approximation register (SAR) analog-to-digital converter (ADC) with high-speed and low-noise dynamic comparator. A gate cross-coupled technique is introduced in boost sampling switch, the clock feedthrough effect is compensated without extra auxiliary switch and the linearity of sampling switch is enhanced. Further, substrate voltage boost technique is proposed, the absolute values of threshold voltage and equivalent impedances of MOSFETs are both depressed. Consequently, the delay of comparator is also reduced. Moreover, the reduction of threshold voltages for input MOSFETs could bring higher transconductance and lower equivalent input noise. To demonstrate the proposed techniques, a design of SAR ADC is fabricated in 65-nm CMOS technology, consuming 1.5 mW from 1 V power supply with a SNDR > 5 5. 8 dB and SFDR > 6 6. 5 dB. The proposed ADC core occupies an active area of 0.021 mm2, and the corresponding FoM is 24.4 fJ/conversion-step with Nyquist frequency. [ABSTRACT FROM AUTHOR]