ab-oriented YBa2Cu3O7 thin film grown on c-axis layer by radio frequency sputtering.
- Resource Type
- Article
- Authors
- Wu, Sijia; Ng, K.-W.; Robertson, J. D.; Jacob, R. J.
- Source
- Journal of Applied Physics. 12/1/1992, Vol. 72 Issue 11, p5337. 4p. 1 Diagram, 2 Graphs.
- Subject
- *YTTRIUM alloys
*ALTERNATING currents
*MAGNETRONS
*SPUTTERING (Physics)
- Language
- ISSN
- 0021-8979
Examines the growth of yttrium-barium-copper-oxygen films on different substrates by the off-axis alternating current magnetron sputtering method. Problems in thin film deposition by sputtering; Use of Rutherford backscattering spectrometry; Cause of electron emissions from below the surfaces.