MesoporousOrganosilicate Films Using Cross-LinkedMicelle Pore Generators.
- Resource Type
- Article
- Authors
- Feller, Bob E.; Lee, Victor Y.; Virwani, Kumar; Knoesen, André; Miller, Robert D.
- Source
- Chemistry of Materials. Jun2013, Vol. 25 Issue 12, p2441-2449. 9p.
- Subject
- *MESOPOROUS materials
*SILICATES
*CROSSLINKING (Polymerization)
*MICELLES
*MESOPORES
*CRYSTAL morphology
- Language
- ISSN
- 0897-4756
Cross-linked micelles are used togenerate large uniform mesoporesin silsesquioxane-based thin films. To our knowledge, this is firsttime cross-linked micelles have been used for this type of application.The cross-linked micelles are fabricated from amphiphilic block copolymersto compatibilize large immiscible domains in the organosilicate. Measuredpore sizes range from 20 to 30 nm depending on the porogen loadinglevel. The spherical morphology is maintained over a wide range ofporogen loading (5 to 50% wt.) as analyzed by scanning electron microscopyand ellipsometric porosimetry. The low-k porous films are stable inwater as a result of the hydrophobic nature of the material, and thefilms can be stacked to form independent dielectric layers for numerousapplications. [ABSTRACT FROM AUTHOR]