Soft X-ray Lithography Beamline at the Siam Photon Laboratory.
- Resource Type
- Article
- Authors
- Klysubun, P.; Chomnawang, N.; Songsiriritthigul, P.
- Source
- AIP Conference Proceedings. 2007, Vol. 879 Issue 1, p1490-1493. 4p. 1 Color Photograph, 2 Diagrams, 1 Chart.
- Subject
- *GRENZ rays
*X-ray lithography
*SYNCHROTRON radiation
*BIOLOGICAL research
- Language
- ISSN
- 0094-243X
Construction of a soft x-ray lithography beamline utilizing synchrotron radiation generated by one of the bending magnets at the Siam Photon Laboratory is finished and the beamline is currently in a commissioning period. The beamline was modified from the existing monitoring beamline and is intended for soft x-ray lithographic processing and radiation biological research. The lithography exposure station with a compact one-dimensional scanning mechanism was constructed and assembled in-house. The front-end of the beamline has been modified to allow larger exposure area. The exposure station for studying radiation effects on biological samples will be set up in tandem with the lithography station, with a Mylar window for isolation. Several improvements to both the beamline and the exposure stations, such as improved scanning speed and the ability to adjust the exposure spectrum by means of low-Z filters, are planned and will be implemented in the near future. © 2007 American Institute of Physics [ABSTRACT FROM AUTHOR]