Subatmospheric gas storage and delivery: Past, present and future.
- Resource Type
- Article
- Authors
- OLANDER, KARL; AVILA, ANTHONY
- Source
- Solid State Technology. Jun2014, Vol. 57 Issue 4, p27-30. 4p.
- Subject
- *TECHNOLOGICAL innovations
*GAS storage
*INDUSTRIAL safety
*SEMICONDUCTORS
*SEMICONDUCTOR industry
- Language
- ISSN
- 0038-111X
The article offers information on technical innovation related to subatmospheric pressure gas storage and delivery in the last 20 years. Topics discussed include use of highly toxic process gases in the semiconductor industry, underlying risk associated with transportation of compressed gases and how safety can be enhanced both by reducing operating pressure and gas inventory.